Klauer, Katja; Eifler, Matthias; Kirsch, Benjamin; Böß, Volker; Seewig, Jörg; Aurich, Jan C.
(London : Springer, 2021)
The calibration of areal surface topography measuring instruments is of high relevance to estimate the measurement uncertainty and to guarantee the traceability of the measurement results. Calibration structures for optical ...